(i) XeO₃ can be prepared in two ways as shown.

6XeF₄ + 12H₂O → 4Xe + 2XeO₃ + 24HF + 3O₂

XeF₆ + 3H₂O → XeO₃ + 6HF

(ii) XeOF₄ can be prepared using XeF₆.

XeF₆ + H₂O → XeOF₄ + 2HF